JPH0315172Y2 - - Google Patents
Info
- Publication number
- JPH0315172Y2 JPH0315172Y2 JP17511184U JP17511184U JPH0315172Y2 JP H0315172 Y2 JPH0315172 Y2 JP H0315172Y2 JP 17511184 U JP17511184 U JP 17511184U JP 17511184 U JP17511184 U JP 17511184U JP H0315172 Y2 JPH0315172 Y2 JP H0315172Y2
- Authority
- JP
- Japan
- Prior art keywords
- spinner
- substrate
- guide groove
- spinner head
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 230000005484 gravity Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 26
- 239000007788 liquid Substances 0.000 description 13
- 239000011347 resin Substances 0.000 description 12
- 229920005989 resin Polymers 0.000 description 12
- 238000004528 spin coating Methods 0.000 description 7
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 230000001012 protector Effects 0.000 description 3
- 239000003086 colorant Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17511184U JPH0315172Y2 (en]) | 1984-11-20 | 1984-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17511184U JPH0315172Y2 (en]) | 1984-11-20 | 1984-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6191370U JPS6191370U (en]) | 1986-06-13 |
| JPH0315172Y2 true JPH0315172Y2 (en]) | 1991-04-03 |
Family
ID=30732715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17511184U Expired JPH0315172Y2 (en]) | 1984-11-20 | 1984-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0315172Y2 (en]) |
-
1984
- 1984-11-20 JP JP17511184U patent/JPH0315172Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6191370U (en]) | 1986-06-13 |
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